Microelectronic Engineering has an open access mirror journal Micro and Nano Engineering, sharing the same aims and scope, editorial team, submission system and rigorous peer review.

Microelectronic Engineering is the premier nanoprocessing, and nanotechnologyjournal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineeringprovides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.

The journal addresses the following topics and considers mostly experimental work, or theoretical / simulation work directly linked and supporting experiments in the fields:
Microelectronics processing & materials (Lithography, Self-assembly, Plasma Processing, Metallization, 3D Integration, Related Materials….)
Micro-/Nano-engineering / fabrication / technology / manufacturing
Nanoelectronic and photonic devices and their fabrication
Microsystems, microdevices (e.g., sensors and nanoenergy devices) and their fabrication
Microfluidics, life science devices /sensors, as well as integrated Lab-on-a-chip and their fabrication
In detail the topics covered are as follows:

1. Nanolithography and Nanopatterning:
Optical Lithography
Electron Optical Methods and Systems
X-ray Optical Methods and Systems
Resists
Limits of Nanolithography
Nanoimprint Lithography
EUV Lithography and Masks
Charged Particle Based Lithography and Patterning
Nanoimprint Lithography Techniques and Templates
Maskless Lithography
Emerging Nanopatterning Methods
Limits of Nanopatterning
2. Pattern Transfer
Ion Technology
Plasma Processing
Transfer of Pattern with Other Methods
Plasma Etching
Plasma Nanotechnology
Plasma / beam Nanopatterning
Plasma Surface Modification of Devices
Wet transfer methods
3. Materials
Metallization and Barrier Materials
Silicon on Insulators
Dielectrics (low K and high K)
Interconnects
New Resist Materials
Nanomaterials for Device Fabrication
Block Copolymers
Polymers and Flexible Substrates
Layered (2D) Materials and Related Transferring Techniques
4. Nanometrology, Inspection and Testing
Electron Beam Testers
Laser Probes
Signal and Image Processing
Nanometrology
AFM and Scanning Probe Measurements
5. Advanced Processing and Nanofabrication
Process Integration
Three Dimensional Integration
Other / Emerging Manufacturing and Fabrication Techniques
3D Printing
Rapid Thermal Processing
Process Modelling and Simulation
Equipment Modelling
Laser Assisted Processing
Top-Down / Bottom-Up (Self-Assembly) Nanofabrication
Growth, Planarization, Cleaning Techniques for Devices
Plasma deposition
MBE
Other growth techniques
Planarization and cleaning techniques
6. Advanced Nanoelectronic, Photonic, Sensing, Energy Harvesting, and Fluidic Devices
Nanoelectronic, Optoelectronic and Photonic Devices
Memristive devices for neuromorphic computing
Steep slope or fast switching devices
Photonic devices
Optoelectronic devices
Dimension-sensitive Device Properties
Memory Devices
Magnetic and spintronic devices
Advanced MOS Devices
Vacuum Nanoelectronics
Flexible / Organic / Molecular Electronics
Organic and molecular electronics
Flexible electronics
Wearable electronics
Paper electronics
Printed electronics
Microdevices, Energy Harvesting Devices and Sensors
Physical sensors and actuators
Energy harvesting devices
7. Chemical, biological, bioelectronic and fluidic devices. Heterogeneous Micro-Nano and Bio Systems
Electro-Mechanical Systems (MEMS, NEMS)
Power MEMS
RF MEMS
MOEMS
Magnetic MEMS
Optical and Photonic Systems
Micro and Nano Fluidic Devices
Pumping / valving devices
Mixing devices
Separation devices
Microreactors
Sample preparation devices
Fluidic interfaces and integration
Miniaturized Devices for Biology, Chemistry, Medicine
Biosensors
Chemical sensors
Biomimetic properties incorporated into devices
Bioelectronic devices
Micro / nano / bio interface and interconnection devices
Lab-on-a-chip, bioMEMS, microTAS
DNA / protein chips
Cell on chip
Organ on chip
Biomimetic properties incorporated into systems
Bioanalytic, diagnostic systems
Microseparation, pretreatment systems
On-chip detection systems
Environmental and food monitoring systems
Microreactors
Manuscripts of 5 (five) types are considered:
Review Articles that inform readers of the latest research and advances in nanoelectronics, nanofabrication, micro-nano systems, and applications (authors should e-mail editors with a review proposal and outline before submitting)
Accelerated Publications (Letters) that feature exciting research breakthroughs in the field
Regular original research papers
Short / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and development work
News and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published work

Review Articles 
Accelerated Publications
Regular papers
Short Communication
Opinion Paper